GI LogoGI Logo
  • Login
Digital Library
    • All of DSpace

      • Communities & Collections
      • Titles
      • Authors
      • By Issue Date
      • Subjects
    • This Collection

      • Titles
      • Authors
      • By Issue Date
      • Subjects
Digital Library Gesellschaft für Informatik e.V.
GI-DL
    • English
    • Deutsch
  • English 
    • English
    • Deutsch
View Item 
  •   DSpace Home
  • Lecture Notes in Informatics
  • Proceedings
  • INFORMATIK - Jahrestagung der Gesellschaft für Informatik e.V.
  • P232 - INFORMATIK 2014
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.
  •   DSpace Home
  • Lecture Notes in Informatics
  • Proceedings
  • INFORMATIK - Jahrestagung der Gesellschaft für Informatik e.V.
  • P232 - INFORMATIK 2014
  • View Item

A kind of multi-disciplinary simulation and design platform for IC chamber based on commercial solver

Author:
Xiaojing, Wu [DBLP] ;
Jia, Cheng [DBLP] ;
Linhong, Ji [DBLP] ;
Yuemin, Hou [DBLP] ;
Yijia, Lu [DBLP]
Abstract
In this paper, a kind of multi-disciplinary simulation and design platform for wafer manufacturing process with Chamber system is presented. This platform is developed as an in-house program, with different functional component for multi-disciplinary problems, which can drive the commercial FEM solver with code. There are also management function for user, products, and analysis or optimization process templates. This platform can be used for analyzing the multidisciplinary process inside chamber system, DOE and optimization analysis for wafer manufacturing process, product and analyzing process template management.
  • Citation
  • BibTeX
Xiaojing, W., Jia, C., Linhong, J., Yuemin, H. & Yijia, L., (2014). A kind of multi-disciplinary simulation and design platform for IC chamber based on commercial solver. In: Plödereder, E., Grunske, L., Schneider, E. & Ull, D. (Hrsg.), Informatik 2014. Bonn: Gesellschaft für Informatik e.V.. (S. 2049-2054).
@inproceedings{mci/Xiaojing2014,
author = {Xiaojing, Wu AND Jia, Cheng AND Linhong, Ji AND Yuemin, Hou AND Yijia, Lu},
title = {A kind of multi-disciplinary simulation and design platform for IC chamber based on commercial solver},
booktitle = {Informatik 2014},
year = {2014},
editor = {Plödereder, E. AND Grunske, L. AND Schneider, E. AND Ull, D.} ,
pages = { 2049-2054 },
publisher = {Gesellschaft für Informatik e.V.},
address = {Bonn}
}
DateienGroesseFormatAnzeige
2049.pdf219.2Kb PDF View/Open

Haben Sie fehlerhafte Angaben entdeckt? Sagen Sie uns Bescheid: Send Feedback

More Info

ISBN: 978-3-88579-626-8
ISSN: 1617-5468
xmlui.MetaDataDisplay.field.date: 2014
Language: en (en)
Content Type: Text/Conference Paper
Collections
  • P232 - INFORMATIK 2014 [297]

Show full item record


About uns | FAQ | Help | Imprint | Datenschutz

Gesellschaft für Informatik e.V. (GI), Kontakt: Geschäftsstelle der GI
Diese Digital Library basiert auf DSpace.

 

 


About uns | FAQ | Help | Imprint | Datenschutz

Gesellschaft für Informatik e.V. (GI), Kontakt: Geschäftsstelle der GI
Diese Digital Library basiert auf DSpace.